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SEMI E63-0298 (technical revision)
The accuracy of the coordinate data generated or used is equipment-dependent
• Equipment and load port access mode switching
consistency and reduction to increase confidence in the accuracy and repeatability of EPOC’s
The PSEM300 extends the generic Process State Model of SEMI E30 (GEM) with a Specific Process State model for prober equipment
E05411 - SEMI E54.11 - Specification for Sensor/Actuator Network Specific Device Model for Endpoint Devices StdPbc-0822 SEMI E63-0298 (technical revision)NOTICE: This Document is no longer published with the SEMI E54 suite of Standards. It is published and sold separately. This Specification is part of a suite of Standards that specify the implementation of SEMI Standards for the Sensor Actuator Network. The specific purpose of this Specification is to describe a network independent application model comprised of device objects that are common to all endpoint devices (EPD) on a semiconductor equipment